Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372042 | System for processing semiconductor wafers producing a downward laminar flow of clean air in front of baking units | Sam S. Han, Chang-wook Oh, Jeong-Lim Nam | 2002-04-16 |
| 6347990 | Microelectronic fabrication system cleaning methods and systems that maintain higher air pressure in a process area than in a transfer area | Sam S. Han, Chang-wook Oh, Kang-sik Lee | 2002-02-19 |