Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6347990 | Microelectronic fabrication system cleaning methods and systems that maintain higher air pressure in a process area than in a transfer area | Woo-Dong Sung, Sam S. Han, Chang-wook Oh | 2002-02-19 |