Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372042 | System for processing semiconductor wafers producing a downward laminar flow of clean air in front of baking units | Woo-Dong Sung, Sam S. Han, Chang-wook Oh | 2002-04-16 |