Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464794 | Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates | Jeong-hyuck Park, Hee-duk Kim, Jung-hun Cho, Jong-wook Choi, Sung-bum Cho +6 more | 2002-10-15 |
| 6372555 | Semiconductor integrated circuit device and method of manufacturing the same | Seung Jae Lee, Tae-Wook Seo | 2002-04-16 |