Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449037 | Method of and device for detecting micro-scratches | Chung-Sam Jun, Sang-bong Choi, Hyung-Suk Cho, Pil-Sik Hyun, Kyu-Hong Lim +1 more | 2002-09-10 |
| 6440760 | Method of measuring etched state of semiconductor wafer using optical impedence measurement | Hyung-Suk Cho, Sang-bong Choi, Chung-sam Chun, Min-Sub Kang | 2002-08-27 |
| 6398874 | Use of alkoxy N-hydroxyalkyl alkanamide as resist removing agent, composition for removing resist, method for preparing the same and resist removing method using the same | Dong-Jin Park, Jin Ho Hwang, June-ing Gil, Je-eung Park | 2002-06-04 |