Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449037 | Method of and device for detecting micro-scratches | Chung-Sam Jun, Sang-Mun Chon, Hyung-Suk Cho, Pil-Sik Hyun, Kyu-Hong Lim +1 more | 2002-09-10 |
| 6440760 | Method of measuring etched state of semiconductor wafer using optical impedence measurement | Hyung-Suk Cho, Sang-Mun Chon, Chung-sam Chun, Min-Sub Kang | 2002-08-27 |
| 6366688 | Apparatus and method for contact failure inspection in semiconductor devices | Chung-Sam Jun, Jeong-kon Kim, Sang-moon Chon | 2002-04-02 |