Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436809 | Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices made using this method | Gyu-hwan Kwag, Se-Jong Ko, Kyung-Seuk Hwang, Jun-ing Gil, Sang-Oh Park +2 more | 2002-08-20 |
| 6366688 | Apparatus and method for contact failure inspection in semiconductor devices | Chung-Sam Jun, Jeong-kon Kim, Sang-bong Choi | 2002-04-02 |