Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460269 | Wafer dryer comprising revolving spray nozzle and method for drying wafers using the same | Yong Joon Cho | 2002-10-08 |
| 6436809 | Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices made using this method | Se-Jong Ko, Kyung-Seuk Hwang, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more | 2002-08-20 |
| 6402849 | Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device | Hyun Han, Ki-Heum Nam | 2002-06-11 |