Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464930 | Furnace of apparatus for manufacturing a semiconductor device having a heat blocker for preventing heat loss during the unloading of wafers | Jae Hyuck An, Chang-Zip Yang, Tae-Chul Kim | 2002-10-15 |
| 6402849 | Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device | Gyu-hwan Kwag, Ki-Heum Nam | 2002-06-11 |