Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465854 | Micromechanical component | Horst Muenzel, Eckhard Graf | 2002-10-15 |
| 6462392 | Micromechanical cap structure and the respective manufacturing method | Stefan Pinter, Harald Emmerich, Hans-Peter Trah | 2002-10-08 |
| 6360605 | Micromechanical device | Stefan Pinter, Martin Schoefthaler, Matthias Illing, Ralf Schellin, Michael Fehrenbach +2 more | 2002-03-26 |