Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462392 | Micromechanical cap structure and the respective manufacturing method | Harald Emmerich, Hans-Peter Trah, Helmut Baumann | 2002-10-08 |
| 6360605 | Micromechanical device | Martin Schoefthaler, Matthias Illing, Ralf Schellin, Helmut Baumann, Michael Fehrenbach +2 more | 2002-03-26 |