Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465854 | Micromechanical component | Horst Muenzel, Helmut Baumann | 2002-10-15 |
| 6406979 | Method for sectioning a substrate wafer into a plurality of substrate chips | Frank Fischer | 2002-06-18 |