Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500766 | Post-cleaning method of a via etching process | Hungyueh Lu, Fang-Fei Liu | 2002-12-31 |
| 6410417 | Method of forming tungsten interconnect and vias without tungsten loss during wet stripping of photoresist polymer | Nien-Yu Tsai, Chun-Wei Chen, Ming-Li Kung | 2002-06-25 |
| 6399509 | Defects reduction for a metal etcher | Hung Yueh Lu, Ray C. Lee | 2002-06-04 |