Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6469341 | Method and device for producing undercut gate for flash memory | Kuo-Tung Sung | 2002-10-22 |
| 6399509 | Defects reduction for a metal etcher | Hung Yueh Lu, Hong-Long Chang | 2002-06-04 |
| 6379491 | Plasma chamber with erosion resistive securement screws | Te-Hsun Pang, Tonny Shu, Birdson Lee | 2002-04-30 |