Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492647 | Electron guns for lithography tools | James A. Liddle, Warren K. Waskiewicz | 2002-12-10 |
| 6448569 | Bonded article having improved crystalline structure and work function uniformity and method for making the same | Warren K. Waskiewicz | 2002-09-10 |
| 6440620 | Electron beam lithography focusing through spherical aberration introduction | Eric Munro, John Rouse, Warren K. Waskiewicz, Xieqing Zhu | 2002-08-27 |
| 6420714 | Electron beam imaging apparatus | Eric Munro, John Rouse, Warren K. Waskiewicz, Xieqing Zhu | 2002-07-16 |
| 6400090 | Electron emitters for lithography tools | James A. Liddle, Warren K. Waskiewicz | 2002-06-04 |