Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440620 | Electron beam lithography focusing through spherical aberration introduction | Victor Katsap, Eric Munro, John Rouse, Warren K. Waskiewicz | 2002-08-27 |
| 6420714 | Electron beam imaging apparatus | Victor Katsap, Eric Munro, John Rouse, Warren K. Waskiewicz | 2002-07-16 |