Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440620 | Electron beam lithography focusing through spherical aberration introduction | Victor Katsap, Eric Munro, Warren K. Waskiewicz, Xieqing Zhu | 2002-08-27 |
| 6441378 | Magnetic energy filter | Katsushige Tsuno, Eric Munro | 2002-08-27 |
| 6420714 | Electron beam imaging apparatus | Victor Katsap, Eric Munro, Warren K. Waskiewicz, Xieqing Zhu | 2002-07-16 |