Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426502 | Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof | — | 2002-07-30 |
| 6424417 | Method and system for controlling the photolithography process | Yoel Cohen | 2002-07-23 |
| 6407809 | Optical inspection system and method | Natalie Levinsohn, Shay Ghilai | 2002-06-18 |
| 6368181 | Apparatus for optical inspection of wafers during polishing | Eran Dvir, Eli Haimovich, Beniamin Shulman | 2002-04-09 |
| 6368182 | Apparatus for optical inspection of wafers during polishing | Eran Dvir, Eli Haimovich, Benjamin Shulman, Rony Abaron | 2002-04-09 |