Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368181 | Apparatus for optical inspection of wafers during polishing | Eran Dvir, Moshe Finarov, Beniamin Shulman | 2002-04-09 |
| 6368182 | Apparatus for optical inspection of wafers during polishing | Eran Dvir, Moshe Finarov, Benjamin Shulman, Rony Abaron | 2002-04-09 |