Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471781 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Ryoki Tobe, Atsushi Sekiguchi, Hitoshi Jimba, So Won Kim | 2002-10-29 |
| 6433872 | Exposure method and apparatus | Kenji Nishi, Seiro Murakami | 2002-08-13 |
| 6384137 | Molded resin product having varied wall thickness and resin composition forming the same | Haruyasu Mizutani, Tadashi Yamamoto, Chisato Masuya | 2002-05-07 |