Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471781 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Yasuaki Tanaka, Atsushi Sekiguchi, Hitoshi Jimba, So Won Kim | 2002-10-29 |
| 6468604 | Method for manufacturing a titanium nitride thin film | Hiroshi Doi, Atsushi Sekiguchi | 2002-10-22 |