Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471781 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Ryoki Tobe, Yasuaki Tanaka, Atsushi Sekiguchi, So Won Kim | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471781 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Ryoki Tobe, Yasuaki Tanaka, Atsushi Sekiguchi, So Won Kim | 2002-10-29 |