Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6496350 | Electrostatic wafer chucks and charged-particle-beam exposure apparatus comprising same | — | 2002-12-17 |
| 6447964 | Charged-particle-beam microlithography methods including chip-exposure sequences for reducing thermally induced lateral shift of exposure position on the substrate | Teruaki Okino, Noriyuki Hirayanagi | 2002-09-10 |
| 6429090 | Fiducial mark bodies for charged-particle-beam (CPB) microlithography, methods for making same, and CPB microlithography apparatus comprising same | Noriyuki Hirayanagi | 2002-08-06 |