Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447964 | Charged-particle-beam microlithography methods including chip-exposure sequences for reducing thermally induced lateral shift of exposure position on the substrate | Tomoharu Fujiwara, Noriyuki Hirayanagi | 2002-09-10 |
| 6376137 | Charged-particle-beam microlithography apparatus and methods including correction of stage-positioning errors using a deflector | — | 2002-04-23 |
| 6362489 | Charged-particle-beam microlithography methods exhibiting reduced thermal deformation of mark-defining member | — | 2002-03-26 |