Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447964 | Charged-particle-beam microlithography methods including chip-exposure sequences for reducing thermally induced lateral shift of exposure position on the substrate | Teruaki Okino, Tomoharu Fujiwara | 2002-09-10 |
| 6433346 | Electrostatic reticle chucks, charged-particle-beam microlithography apparatus and methods, and semiconductor-device manufacturing methods comprising same | — | 2002-08-13 |
| 6429090 | Fiducial mark bodies for charged-particle-beam (CPB) microlithography, methods for making same, and CPB microlithography apparatus comprising same | Tomoharu Fujiwara | 2002-08-06 |
| 6399945 | Backscattered-electron detection systems and associated methods | — | 2002-06-04 |