Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497795 | Method and apparatus for decomposing gaseous aliphatic hydrocarbon halide compound | — | 2002-12-24 |
| 6480262 | Illumination optical apparatus for illuminating a mask, method of manufacturing and using same, and field stop used therein | Masashi Tanaka, Masaki Kato | 2002-11-12 |
| 6469683 | Liquid crystal optical device | Shiro Suyama, Munekazu Date, Shigeto Kohda, Shigenobu Sakai | 2002-10-22 |
| 6462250 | Method for decomposing halogenated aliphatic hydrocarbon compounds having adsorption process and apparatus for decomposition having adsorption means | Akira Kuriyama | 2002-10-08 |
| 6444015 | Apparatus for treating gas containing substance to be decomposed and method of treating its gas | — | 2002-09-03 |
| 6351305 | Exposure apparatus and exposure method for transferring pattern onto a substrate | Masahi Tanaka, Masato Kumazawa, Masaki Kato, Hiroshi Chiba, Hiroshi Shirasu | 2002-02-26 |