Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6377333 | Method of adjusting projection optical apparatus | Toshikazu Yoshikawa | 2002-04-23 |
| 6351305 | Exposure apparatus and exposure method for transferring pattern onto a substrate | Masahi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Shirasu | 2002-02-26 |