Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480262 | Illumination optical apparatus for illuminating a mask, method of manufacturing and using same, and field stop used therein | Masashi Tanaka, Kinya Kato | 2002-11-12 |
| 6378483 | Lubrication system for four-stroke engine | — | 2002-04-30 |
| 6351093 | Floppy disk drive control apparatus capable of ensuring seek operation using a stepping motor having a low torque | Hideaki Hayasaka, Yoshihito Otomo, Koichi Seno | 2002-02-26 |
| 6351305 | Exposure apparatus and exposure method for transferring pattern onto a substrate | Masahi Tanaka, Masato Kumazawa, Kinya Kato, Hiroshi Chiba, Hiroshi Shirasu | 2002-02-26 |