Issued Patents 2002
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6496248 | Stage device and exposure apparatus and method | — | 2002-12-17 |
| 6495934 | Method of manufacturing linear motor, linear motor, stage apparatus equipped with linear motor and exposure apparatus | Yutaka Hayashi | 2002-12-17 |
| 6475668 | Nonaqueous electrolyte battery sealed in a film case | Takehiro Hosokawa | 2002-11-05 |
| 6433765 | Liquid crystal display | Kouji Fujiwara, Tomohiko Yamamoto, Naoto Inoue, Hideki Ichioka, Hisao Okada | 2002-08-13 |
| 6404477 | Liquid crystal display apparatus | Kouji Fujiwara, Tomohiko Yamamoto, Naoto Inoue, Hideki Ichioka | 2002-06-11 |
| 6395094 | Process system with transfer unit for object to be processed | Shinsuke Asao, Masahito Ozawa, Masaki Sohma | 2002-05-28 |
| 6392728 | LCD with color filter substrate with tapering color filter portions overlapped by electrode and black matrix layers | Tomohiko Yamamoto | 2002-05-21 |
| 6388646 | Display device | Koji Fujiwara, Tomohiko Yamamoto, Naoto Inoue, Hideki Ichioka | 2002-05-14 |
| 6384065 | Spiro compounds or salts thereof and preventives/remedies for autoimmune diseases and AP-1 inhibitors containing the same | Hisaaki Chaki, Yukihiko Aikawa, Mikako Miyajima, Morihiro Nishio, Hiroshi Kuroda +2 more | 2002-05-07 |
| 6366342 | Drive apparatus, exposure apparatus, and method of using the same | — | 2002-04-02 |
| 6339023 | Method of reducing stress in blanket tungsten film formed by chemical vapor deposition process | Masaki Kitazaki | 2002-01-15 |
| 6339266 | Planar motor device, stage unit, exposure apparatus and its making method, and device and its manufacturing method | — | 2002-01-15 |