Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501110 | Semiconductor memory cell | Mikio Mukai, Toshio Kobayashi | 2002-12-31 |
| 6495934 | Method of manufacturing linear motor, linear motor, stage apparatus equipped with linear motor and exposure apparatus | Keiichi Tanaka | 2002-12-17 |
| 6469935 | Array architecture nonvolatile memory and its operation methods | — | 2002-10-22 |
| 6426790 | Stage apparatus and holder, and scanning exposure apparatus and exposure apparatus | — | 2002-07-30 |
| 6418062 | Erasing methods by hot hole injection to carrier trap sites of a nonvolatile memory | Seiki Ogura, Tomoya Saito | 2002-07-09 |
| 6399441 | Nonvolatile memory cell, method of programming the same and nonvolatile memory array | Seiki Ogura | 2002-06-04 |
| 6388733 | Exposure apparatus with an anti-vibration structure | — | 2002-05-14 |
| 6388293 | Nonvolatile memory cell, operating method of the same and nonvolatile memory array | Seiki Ogura | 2002-05-14 |
| 6385498 | Manufacturing method for microlithography apparatus | — | 2002-05-07 |
| 6347050 | Semiconductor memory cell and method of manufacturing the same | Mikio Mukai | 2002-02-12 |