Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6339023 | Method of reducing stress in blanket tungsten film formed by chemical vapor deposition process | Keiichi Tanaka | 2002-01-15 |
MK
Masaki Kitazaki
Overall (2002): #161,308 of 266,432Top 65%
1
Patents 2002