Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449530 | Semiconductor wafer carrier, semiconductor wafer carrier automatic transfer system and method for producing a semiconductor device | Akira Ono | 2002-09-10 |
| 6440828 | Process of fabricating semiconductor device having low-resistive contact without high temperature heat treatment | Shunichiro Sato, Toshiki Shinmura, Tetsuya Taguwa, Koji Urabe | 2002-08-27 |
| 6395456 | Semiconductor device achieving higher integration, method of manufacturing thereof, and method of forming resist pattern used therefor | Naohisa Tamada | 2002-05-28 |
| 6353786 | Braking device for an electrically-powered car that uses a load of an electrical motor as a braking force | Jun Yamada | 2002-03-05 |
| 6344411 | OHMIC contact plug having an improved crack free tin barrier metal in a contact hole and method of forming the same | Takashi Yokoyama | 2002-02-05 |