Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475907 | Semiconductor device having a barrier metal layer and method for manufacturing the same | — | 2002-11-05 |
| 6440828 | Process of fabricating semiconductor device having low-resistive contact without high temperature heat treatment | Shunichiro Sato, Toshiki Shinmura, Yoshiaki Yamada, Koji Urabe | 2002-08-27 |
| 6432493 | Method of carrying out plasma-enhanced chemical vapor deposition | — | 2002-08-13 |
| 6404058 | Semiconductor device having interconnection implemented by refractory metal nitride layer and refractory metal silicide layer and process of fabrication thereof | — | 2002-06-11 |