Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440828 | Process of fabricating semiconductor device having low-resistive contact without high temperature heat treatment | Shunichiro Sato, Toshiki Shinmura, Yoshiaki Yamada, Tetsuya Taguwa | 2002-08-27 |
| 6407003 | Fabrication process of semiconductor device with titanium film | — | 2002-06-18 |
| 6383302 | Apparatus and method for manufacturing semiconductor device | — | 2002-05-07 |