Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6496255 | Measurement of crystal face orientation | Belgacem Haba, Yukio Morishige | 2002-12-17 |
| 6465354 | Method of improving the planarization of wiring by CMP | Nobukazu Ito, Hiroaki Tachibana | 2002-10-15 |
| 6403468 | Method for forming embedded metal wiring | — | 2002-06-11 |
| 6368981 | Method of manufacturing semiconductor device and chemical mechanical polishing apparatus | Yasuaki Tsuchiya | 2002-04-09 |