Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6398906 | Wafer transfer apparatus and wafer polishing apparatus, and method for manufacturing wafer | Tatsunori Kobayashi, Hiroshi Tanaka | 2002-06-04 |
| 6368189 | Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure | Gerard S. Maloney, Jason Price, Scott Chin, Malek Charif | 2002-04-09 |
| 6346038 | Wafer loading/unloading device and method for producing wafers | Yoshie Kaido, Masahito Komasaki | 2002-02-12 |