Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6453758 | Efficient high-productivity cascade impactors | Daryl L. Roberts, Benjamin Y. H. Liu | 2002-09-24 |
| 6431014 | High accuracy aerosol impactor and monitor | Benjamin Y. H. Liu | 2002-08-13 |
| 6349668 | Method and apparatus for thin film deposition on large area substrates | James J. Sun, Benjamin Y. H. Liu | 2002-02-26 |