Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6409839 | Method and apparatus for vapor generation and film deposition | Benjamin Y. H. Liu | 2002-06-25 |
| 6364941 | Compact high efficiency electrostatic precipitator for droplet aerosol collection | Benjamin Y. H. Liu | 2002-04-02 |
| 6349668 | Method and apparatus for thin film deposition on large area substrates | Benjamin Y. H. Liu, Virgil A. Marple | 2002-02-26 |