Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6453758 | Efficient high-productivity cascade impactors | Virgil A. Marple, Daryl L. Roberts | 2002-09-24 |
| 6431014 | High accuracy aerosol impactor and monitor | Virgil A. Marple | 2002-08-13 |
| 6409839 | Method and apparatus for vapor generation and film deposition | James J. Sun | 2002-06-25 |
| 6364941 | Compact high efficiency electrostatic precipitator for droplet aerosol collection | James J. Sun | 2002-04-02 |
| 6349668 | Method and apparatus for thin film deposition on large area substrates | James J. Sun, Virgil A. Marple | 2002-02-26 |