Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387787 | Lithographic template and method of formation and use | David Mancini, Doug Resnick | 2002-05-14 |
| 6368752 | Low stress hard mask formation method during refractory radiation mask fabrication | Douglas J. Resnick | 2002-04-09 |
| 6355384 | Mask, its method of formation, and a semiconductor device made thereby | Pawitter S. Mangat | 2002-03-12 |