Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368752 | Low stress hard mask formation method during refractory radiation mask fabrication | William J. Dauksher | 2002-04-09 |
| 6368924 | Amorphous carbon layer for improved adhesion of photoresist and method of fabrication | David Mancini, Steven M. Smith | 2002-04-09 |