Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387787 | Lithographic template and method of formation and use | Doug Resnick, William J. Dauksher | 2002-05-14 |
| 6368924 | Amorphous carbon layer for improved adhesion of photoresist and method of fabrication | Steven M. Smith, Douglas J. Resnick | 2002-04-09 |