Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473665 | Defect analysis method and process control method | Nobuyoshi Hattori | 2002-10-29 |
| 6400038 | Alignment method and semiconductor device | Yoko Miyazaki | 2002-06-04 |
| 6344897 | Inspection apparatus for foreign matter and pattern defect | Yoko Miyazaki | 2002-02-05 |
| 6341241 | Defect analysis method and process control method | Nobuyoshi Hattori | 2002-01-22 |