Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473665 | Defect analysis method and process control method | Toshiaki Mugibayashi | 2002-10-29 |
| 6465316 | SOI substrate and semiconductor device | Satoshi Yamakawa, Junji Nakanishi | 2002-10-15 |
| 6372593 | Method of manufacturing SOI substrate and semiconductor device | Satoshi Yamakawa, Junji Nakanishi | 2002-04-16 |
| 6341241 | Defect analysis method and process control method | Toshiaki Mugibayashi | 2002-01-22 |