Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6437862 | Defect inspection apparatus | Masahiko Ikeno | 2002-08-20 |
| 6400038 | Alignment method and semiconductor device | Toshiaki Mugibayashi | 2002-06-04 |
| 6344897 | Inspection apparatus for foreign matter and pattern defect | Toshiaki Mugibayashi | 2002-02-05 |