Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492279 | Plasma etching methods | Bradley J. Howard, Kevin G. Donohoe | 2002-12-10 |
| 6451678 | Method of reducing overetch during the formation of a semiconductor device | — | 2002-09-17 |
| 6436844 | Semiconductor structure useful in a self-aligned contact etch and method for making same | — | 2002-08-20 |
| 6342165 | Method of forming high aspect ratio apertures | Kevin G. Donohoe | 2002-01-29 |