Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492279 | Plasma etching methods | David S. Becker, Kevin G. Donohoe | 2002-12-10 |
| 6420259 | Formation of a self-aligned structure | — | 2002-07-16 |
| 6413875 | Process and apparatus for improving the performance of a temperature-sensitive etch process | Guy T. Blalock | 2002-07-02 |
| 6400029 | Self-limiting method of reducing contamination in a contact opening, method of making contacts and semiconductor devices therewith, and resulting structures | Guy T. Blalock | 2002-06-04 |
| 6355566 | Method of removing surface defects or other recesses during the formation of a semiconductor device | Mark E. Jost, Guy T. Blalock | 2002-03-12 |
| 6350706 | Process for using photo-definable layers in the manufacture of semiconductor devices and resulting structures of same | — | 2002-02-26 |
| 6335292 | Method of controlling striations and CD loss in contact oxide etch | Li Li | 2002-01-01 |