Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447634 | Method and apparatus for selective removal of material from wafer alignment marks | Russell C. Zahorik, Guy F. Hudson, Hugh Stroupe, Todd A. Dobson | 2002-09-10 |
| 6429146 | Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing | Guy T. Blalock, Hugh E. Stroupe | 2002-08-06 |
| 6410459 | Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing | Guy T. Blalock, Hugh E. Stroupe | 2002-06-25 |
| 6398868 | Substrate coating apparatus | Paul D. Shirley | 2002-06-04 |