Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497734 | Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput | Kenneth K. Barber, Mark Fissel, Soo Yun Joh, Mukul Khosla, Karl B. Levy +2 more | 2002-12-24 |