Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416836 | Thermally annealed, low defect density single crystal silicon | Robert J. Falster, Alan Wang | 2002-07-09 |
| 6361619 | Thermally annealed wafers having improved internal gettering | Robert J. Falster, Harold W. Korb | 2002-03-26 |